Intel Unveils 14A Chip Manufacturing Process Utilizing High-NA EUV Technology

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Did Intel in the past make its own lithography machinery? It always seemed to me Intel used to walk its own path, especially when it was ahead of others years ago. It was quite recently, relatively speaking, that Intel failed and failed to really get ahead in shrinking the process technology successfully, even going as far as becoming a TSMC customer for big products, like the GPUs. So, I was under an impression Intel wasn't an ASML customer at all in the past and only had to seek help from them when they got stuck at 10nm, or something. I could be utterly wrong, though.
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Lithography machines are all made by ASML, I think.
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alanm:

Sole makers of extreme ultraviolet lithography machines. They have an interesting history. https://en.wikipedia.org/wiki/ASML_Holding
Considering their machines sell for hundreds of millions of dollars a piece, it's shocking how their profit margins are less than 1/3 their revenue. But, when you know what goes into each of these machines, you start to understand they're not just expensive because they're a monopoly, and, you also start to understand why they're a monopoly.